TruPlasma RF Plasma Generation
In partnership with Trumpf Huttinger, we offer turnkey TruPlasma RF retrofit/replacement solutions. TruPlasma RF Generators deliver high-precision, reproducible RF energy with extremely fine resolution for PVD, PECVD, RIE, IMPLANT and other RF plasma processes.
Smart Auto Frequency Tuning
Guarantees optimum and very fast frequency tuning, and thus an optimum interaction between the generator and matchbox.
Multi-level, flexible control of the pulse shape for improved process results in modern plasma processes.
Stable Plasma Processes
The patented CombineLine technology guarantees uniform process power due to a true output impedance of 50 ohms.
Independence from the RF Cable Length
In the event of process changes or changes to the system, it is no longer necessary to adjust the cable lengths.
High Precision Arc Management
Safe operation of demanding and new processes ensures your product is protected.
Plug & Play
Flexible use and replacement of generators possible in the event of process changes or retrofitting.
Uniform Generator Technology
With various power classes within the RF product family, all process requirements can be met.