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TruPlasma RF Plasma Generation

In partnership with Trumpf Huttinger, we offer turnkey TruPlasma RF retrofit/replacement solutions. TruPlasma RF Generators deliver high-precision, reproducible RF energy with extremely fine resolution for PVD, PECVD, RIE, IMPLANT and other RF plasma processes.

Smart Auto Frequency Tuning

Guarantees optimum and very fast frequency tuning, and thus an optimum interaction between the generator and matchbox.

Multi-Level Pulsing

Multi-level, flexible control of the pulse shape for improved process results in modern plasma processes.

Stable Plasma Processes

The patented CombineLine technology guarantees uniform process power due to a true output impedance of 50 ohms.

Independence from the RF Cable Length

In the event of process changes or changes to the system, it is no longer necessary to adjust the cable lengths.

High Precision Arc Management

Safe operation of demanding and new processes ensures your product is protected.

Plug & Play

Flexible use and replacement of generators possible in the event of process changes or retrofitting.

Uniform Generator Technology

With various power classes within the RF product family, all process requirements can be met.

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